3M™ Dyneon™ Perfluoroelastomer PFE 7403WZ

The Dyneon Perfluoroelastomer compound PFE 7403WZ is a proprietary polymer-filled high temperature perfluoroelastomer specifically designed for use in semiconductor applications. It has excellent physical properties at continuous high service temperatures of 300°C and resistance to oxygen- and fluorine-containing plasma environments.

Special Features

• Proprietary 75 Shore A white compound

• Designed for high temperature applications

• Continuous operating temperature of > 300 °C

• Low particle generation

• Low weight loss

• Low outgassing

• High purity

• Excellent aggressive fluorinated plasma resistance

• Low long term compression set

• Excellent chemical resistance

Typical Applications
The Dyneon Perfluoroelastomer compound PFE 7403WZ is typically used across a wide range of wafer production processes.